This investigation envisages the static practical response of a cantilever beam mechanically actuated utilizing piezoceramic patches. This application is a continuation of international application no. This publication deals with the design of carbon nanotubes cnt based nanoelectromechanical system nems consisting in a variable capacitor working at microwave frequencies. Comsol software users who are onsubscription should submit their questions via the. Design and fabrication of pdmsbased electrostatically. Finite element modeling and simulation of electrostatic micro. I need further insights into the following topics pertaining to this problem. Static analysis of electrostatically actuated micro cantilever beam the microbeam requires mechanical energy to obtain a vibrating or translating motion based on the application of mems. Use this model or demo application file and its accompanying instructions as a starting point for your own simulation work. A 3d model exploiting bilateral symmetry of this variable capacitor is built in comsol multiphysics software. Lin 3 1 arizona state university, department of electrical engineering, tempe, az 85287 2 freescale semiconductor, sensor and analog products division, tempe, az 85284. An electric charge is created around the electric field due to potential difference between two conductors refer figure 2.
Sayanu pamidighantam 1, robert puers 2, kris baert 1 and harrie a c tilmans 1. The capacitor is set up to be actuated both magnetically and electrostatically via a. Also an electrostatically actuated cantiliver beam was simulated to see the. Warning your internet explorer is in compatibility mode and may not be displaying the website correctly. In this model i make an accurate modeling for electrostatically actuated cantilever on. This paper presents a matrix configuration of electrostatically actuated microcantilever relay arrays that are connected in parallel to shunt high currents to individual relay elements. To start a new discussion with a link back to this one, click here. A simulation of an electrostatically actuated cantilever beam is also reported in this paper which is commonly used in rf switches. This model shows the bending of a cantilever beam under an applied electrostatic load. Pullin voltage analysis of electrostatically actuated beam structures with fixedfixed and fixedfree end conditions.
Feasibility study of a resonant accelerometer with. Electrostatically actuated cantilever electrostatics. The microscopic size of mems devices accounts for strong coupling effects which arise between the different physical fields and forces. How to model electromechanics in comsol multiphysics. Pullin voltage study of various structured cantilever and. The electrostatic force is modeled to include fringe effect. In order to fully evaluate whether or not the comsol multiphysics software will meet your requirements, you need to.
Static analysis of electrostatically actuated micro. The microcantilever has algangan hfet embedded on its base. Apr 22, 2020 in this work, the design and fabrication of electrostatically actuated polydimethylsiloxane pdms mems cantilever on flexible pdms substrate is presented. Figure 1 shows profile of surface electric potential and figure 2 profile of surface total displacement of zcomponent. The essential factors such as geometric and inertial nonlinearities, higherorder distribution of electrostatic pressure, and nonlinear squeeze. Introduction the elastic cantilever beam is an elementary structure. Different designs and parameters such as the air gap, cantilever thickness and young modulus value depends on different material have been chosen for analysing the. Electrostatically actuated cantilever in the model library and our online model gallery, you can find several comsol multiphysics example models relevant to adaptive optics systems. Pullin voltage evaluation is significant for the design of electrostatically actuated mems devices. For simplicity, this example uses the relaxationbased algorithm rather than the newton method to.
The presented model consists of two stationary electrodes in the same plane along with a flexible electrode above and in the middle of the two electrodes. Prediction of pullin phenomena and structural stability. In this study, a new analytical model is developed for an electrostatic microelectromechanical system mems cantilever actuator to establish a relation between the displacement of its tip and the applied voltage. It always pops up a dialog says undefined value found in the equation residual vector. Micromirrors are essential parts of microswitches in fiber optic network telecommunication. Comsol access is a service we provide to our users and prospects. This stepbystep instructional video shows you how the electromechanics interface in comsol multiphysics couples and solves mechanical and electrical problems. Comsol is the developer of comsol multiphysics software, an interactive environment for modeling and simulating scientific and engineering problems.
Excerpt from the roceedings of the comsol conference 2010 oston. Improving the power of optical systems via component design. Comsol multiphysics software been used to simulate the switch. Modeled electroformed mems variable capacitors for cobalt. The switch simulated in this research was using electrostatic actuation method. Simulation and analysis of actuation voltage of electrostatically actuated rf mems cantilever switch abstract. Model of the cantilever actuated by fringing electrostatic field 2. If you still need help with comsol and have an onsubscription license, please visit our support center for help. Governing equations of an electrostatically actuated clampedclamped and a cantilever narrow microbeam. A simulation of an electrostatically actuated mems resonator using the electromechanics interface of the mems module.
When the voltage v is applied across the two electrodes, electrostatic force is generated. The nonlinear electrostatic force was valuated via numerical methods implemented in comsol software where threedimensional simulations were performed for different gaps. In his keynote talk at the comsol conference 2018 lausanne, andri bezzola of. The convergence problems for au electrostatically actuated cantilever. In this model i make an accurate modeling for electrostatically actuated cantilever on comsol to study its behavior. Mechanical behavior simulation of memsbased cantilever beam.
The comsol simulation software computes the electrostatic forces in a selfconsistent manner throughout the process. Static and dynamic analysis is carried out using a simulation technique based on finite element method using comsol multiphysics. The model solves the deformation of the beam under an applied voltage. Design considerations of a mems cantilever beam switch for. The elastic cantilever beam is one of the elementary structures used in mems designs. Comsol webinar modeling coils and electric devices. Characterization of an algangan electrostatically actuated cantilever using finite element method. Pdf static analysis of electrostatically actuated micro. The damping characteristic and the resonance frequency of these modes are examined for a wide.
The goal of experiment here was to investigate the response of an electrostatically deflected, piezo actuated rigid cantilever aluminium beam. For the love of physics walter lewin may 16, 2011 duration. Another significant limiting factor is the high contact resistance resulted from the low driving force, which is provided by microactuators. Viscoelastic and silicon nitride microbeams are fabricated and are electrostatically actuated by various electrode configurations to trigger the first, second, and third modes. Can anyone tell me the steps to apply the load and actuation voltage to the beam.
Comsol multiphysics based on finite element method. In this work, a 3d model of an electrostatically actuated micro cantilever has been developed using comsol for characterization using the finite element method fem. This device is based on an array of moveable cnt cantilever electrostatically actuated over a ground plane figure 1 and 2. Electrostatically actuated cantilever using finite element method nicholas deroller, muhammad qazi, jie liu, and. Each software update is a small download that updates your current installation. So, i have applied the voltage on the top plate and grounded the bottom plate. The results are also compared with existing literature. Electrostatically actuated mems relay arrays for highpower. To model a mems device, you first define the geometry in the software, either by using the native modeling tools of comsol, or by importing a cad model. Modelling of cantilever beam is done in multiphysics environment. Finite element analysis of electrostatically actuated mems. I am new to comsol and presently trying to simulate the pullin instability of electrostatically actuated micro beams in comsol mems module.
Pdf mechanical behavior simulation of memsbased cantilever. Static analysis using comsol multiphysics finite element package is done to validate the results. Lakshmoji kosuru assistant professor gitam university. This paper deals with the analysis of structural mechanical properties of electrostatically driven prestressedmicromirrorusing comsol multiphysics 4. This discussion is about an older version of the comsol multiphysics software. An electrostatically actuated micro cantilever beam is schematically shown in figure 3. Static analysis of electrostatically actuated micro cantilever beam. To this end, the governing partial differential equation of equilibrium is considered and reduced to an algebraic equation using a simple and computationally efficient single. The cantilevers playing a key role in micro electro. A new analytical model to estimate the voltage value and. Stability analysis of an electrostatically actuated out of. I am modelling electrostatically actuated switch in comsol 4. Characterization of an algangan electrostatically actuated.
The objective of the present paper is to represent a novel method to investigate the stable and unstable behaviors of fully clamped rectangular nanomicroplates under the effects of electrostatic and casimir pressures. Mems software for mictroelectricalmechanical systems. Displacement in an electrostatically actuated cantilever. Published 19 june 2002 journal of micromechanics and microengineering, volume 12, number 4. The capacitor is comprised of copper electrical connections, an actuation electrode, a bottom capacitor plate, an anchor post, and a top capacitor plate attached to the end of a suspended bimorph cantilever. Different designs and parameters such as the air gap, cantilever thickness and young modulus value depends on different material have been chosen for analysing the actuation voltage. Comsol software users who are onsubscription should submit their questions via the support center for a. Comsol software is used in multi physics environment. This paper investigates the parametric resonance of electrostatically actuated microelectromechanicalsystems mems cantilever resonators. I build a model to estimate the bending loss of a optical waveguide. To help the learning process, there is a streamlined. They take the stray capacitances into consideration, but they announce the pullin action for y d 0 3 which is valid for parallelplate case. Aug 28, 2007 hi everyone, ive just started to use comsol for the study of a simple cantilever beam and im facing some problems while calculating the eigenfrequencies and the frequencyresponse. Comparison the various design of cantilever mems switch using.
Comsol multiphysics software understand, predict, and optimize. How to apply load and actuation voltage to a beam in comsol. They are usually 1 to 3 mm in size, fabricated from single crystalline silicon and mostly are electrostatically actuated. This is, i think, a fairly conventional electrostatically actuated micromechanical relay application, and it would be nice to see it work. A side electrode of length l s and thickness d s is located at the distance g. How to set up and run a simulation with comsol multiphysics a proper introduction on how to set up and run a model in comsol multiphysics is essential when learning how to use the software. Using the same electromechanics interface, you can also perform a modal, frequency, and transient analysis of a mems cantilever. Comparison the various design of cantilever mems switch. May 17, 2016 the present study is concerned with the theoretical investigation of pullin phenomena and their significance for assessing structural instability of a mems switch, modeled as electrostatically actuated micro cantilever beam coupled with a rigid plate. A 3d model of an electrostatically actuated micro cantilever has been developed for characterization using the finite element method. Jun 18, 2014 this stepbystep instructional video shows you how the electromechanics interface in comsol multiphysics couples and solves mechanical and electrical problems. Journal of nanoscience hindawi publishing corporation. Mechanical behavior simulation of memsbased cantilever.
As i am very new to comsol multiphysics, its very difficult for me to find the. I am new to comsol and am trying to model an electrostatically actuated cantilever where the beam is thicker near the tip than at the anchor. For instance, the model of the electrostatically actuated cantilever shows the bending of an elastic cantilever beam due to electrostatic forces. Design and optimization of electrostatically actuated. The convergence problems for au electrostatically actuated. This paper presents the studies of mechanical behavior of mems cantilever beam made of polysilicon material, using the coupling of three application modes plane strain, electrostatics and the moving mesh of comsol multiphysics software. In this work simple closed form models are derived for computation of pullin voltage of cantilever beams. Pullin voltage analysis of electrostatically actuated beam. Electrostatically actuated cantilever comsol multiphysics. Aug 03, 2015 for the love of physics walter lewin may 16, 2011 duration. In this work, the design and fabrication of electrostatically actuated polydimethylsiloxane pdms mems cantilever on flexible pdms substrate is presented.
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